德国Raith  www.raith.com
Raith 有限公司生产一系列供研发使用的电子束光刻系统。该系统能满足大学及工业生产中的研究人员、设计人员和工程师的要求。该公司的电子束光刻产品既包括适用于SEM（扫描电子显微镜）或FIB（聚焦离子束）的电脑制图附件，也包括对整个硅片和掩膜具有处理能力的
完整系统。
e_LiNE，这一分辨率极高的电子束光刻系统是一个可供大学和其他学术机构使用的、已达到最新技术发展水平的工具。可供选择使用的纳米操作台、EBID 和EBIE 扩展了该系统的功能，使其适用于各种纳米工程工作站。e_LiNE 电子束光刻系统可供多数CNT 研究、薄膜工程、光
子晶体和EBID 使用。
Raith 有限公司同时也生产用于故障分析的超高精密度样本镜台和软件导航组件。ESCOSY Plus是包括Defect-Review（缺陷复查）、CAD navigation（导航）、Bit-Fail Map review（点缺陷地图复查）和Metrology（度量衡学）等特点在内的所有分析工具的导航解决方案。ASEM （扫描电子显微镜专用）系统具有特殊功能，如逆向工程或高精度测量。它是Raith 设计、制造先进的、具有前沿性的系统的典范。
5 年来，Raith 有限公司一直在使用其在多特蒙德的应用实验室，不断提高电子束光刻系统知识和Raith 电子束光刻系统设备的性能。
Raith 有限公司的全球服务和销售伙伴为客户提供帮助。
Raith 有限公司会在网站上发布其每年举行的活动，如客户会面会、培训课程和纳米研讨会等。
2006 年是Raith 有限公司成立26 周年纪念日，我们感谢所有客户对我们产品的信任。

Raith manufactures a variety of electron beam lithography systems for research and
development applications. The tools are designed to meet the needs of researchers, designers,
and engineers in both university and industry settings. Our family of lithography products
range from PC driven pattern generator attachments for SEMs or FIBs, to complete systems
with full wafer and mask handling capabilities.
e_LiNE, an ultra high resolution electron beam lithography system, is a state-of-the-art tool
for universities and other academic institutions. Selected options for nanomanipulation, EBID
and EBIE expand this system to a versatile nano engineering workstation. The state-of-theart
e_LiNE electron column matches perfectly with a number of key applications in CNT
research, thin film engineering, photonic crystals and EBID.
Raith GmbH also manufactures ultra-high precision sample stages and software navigation
packages for failure analysis applications. ESCOSY Plus is the navigation solution for all
your analytical tools featuring: Defect-Review, CAD navigation, Bit-Fail Map review and
Metrology in one economical package. ASEMs (Application Specific SEMs) with specialized
functions, such as reverse engineering or high-precision metrology, are examples of Raith
expertise for design and manufacturing of advanced, leading edge, systems.
Since about 5 years Raith GmbH is operating its own application laboratory in Dortmund for
continuously increasing the EBL process knowledge and the performance of Raith EBL tools.
A global network of service and sales partners is supporting our customers.
Annual events like user meetings, trainings courses and the Raith NANO seminar are
announced on our web site.
In 2006 Raith GmbH has celebrated its 26th anniversary. We thank all our customers for their
trust in Raith products!
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总部
Raith GmbH
Hauert 18
D-44227 Dortmund
Germany / 德国
电话：(+)49 - 23 19 75 00 00
传真：(+)49 - 23 19 75 00 05
电邮：postmaster@raith.de
网站：www.raith.ccom
联系人
Dirk BRÜGGEMANN 先生
国际营销总监
电话：(+)49 - 23 19 75 00 032
传真：(+)49 - 23 19 75 00 05
电邮：dbrueggemann@raith.de
中国代表处
北京汇德信科技有限公司
中国北京海淀区五道口华清家园7 号楼706 室
邮编：100083
电话：(+)86 - 1 0 82 86 79 20 /21 /22
传真：(+)86 - 10 82 86 79 19
电邮：contact@germantech.com.cn
联系人
孙晓玉女士
项目经理
网站：(+)86 - 10 82 86 79 20
传真：(+)86 - 10 82 86 79 19
电邮：xysun@germantech.com.cn